Charged particle beam apparatus

A charged particle beam apparatus, comprising:

• a detector configured to detect at least one of a charged particle emitted from a sample by irradiation with a charged particle beam emitted from a charged particle source and a charged particle generated by collision of the charged particle emitted from the sample with another member, wherein
• the detector includes a scintillator configured to emit light when the charged particle is incident, a light receiving element configured to convert the light into an electrical signal, and a light guide configured to guide the light generated from the scintillator to the light receiving element,
• the light guide includes
• an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident,
• an emitting surface that faces the light receiving element and is configured to emit light, and
• a reflecting surface that faces the incident surface and is inclined with respect to the incident surface so that the light incident from the incident surface is reflected toward a direction of the emitting surface,
• an upper surface disposed between the reflecting surface and the emitting surface at an inclination angle different from that of the reflecting surface,
• the emitting surface is smaller than the incident surface,
• in a cross section including the scintillator, the light guide, and the light receiving element, a projection length of the reflecting surface to a surface parallel to the incident surface is larger than a projection length of the upper surface to the surface parallel to the incident surface, and
• in the cross section, the projection length of the reflection surface to the surface parallel to the incident surface is larger than the projection length of the scintillator to the surface parallel to the incident surface.

A charged particle beam apparatus, comprising:

• a detector configured to detect at least one of a charged particle emitted from a sample by irradiation with a charged particle beam emitted from a charged particle source and a charged particle generated by collision of the charged particle emitted from the sample with another member, wherein
• the detector includes a scintillator configured to emit light when the charged particle is incident, a light receiving element configured to convert the light into an electrical signal, and a light guide configured to guide the light generated from the scintillator to the light receiving element,
• the light guide includes
• an incident surface that faces a light emitting surface of the scintillator and to which the light emitted by the scintillator is incident,
• an emitting surface that faces the light receiving element and is configured to emit light, and
• a reflecting surface that faces the incident surface and is inclined with respect to the incident surface so that the light incident from the incident surface is reflected toward a direction of the emitting surface,
• the emitting surface is smaller than the incident surface,
• a cross-sectional area when the light guide is cut parallel to the emitting surface becomes smaller as a cross section approaches the emitting surface
• the light guide has a region on the side of the light emitting surface where a cross-sectional area when the light guide is cut parallel to the light emitting surface becomes smaller as a cross section approaches, and has a region on the side of incident surface is cut parallel to the light emitting surface becomes larger as a cross section approaches.