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US 11,694,870 B2Granted
Stage apparatus
AssigneeASML Netherlands B.V.
InventorsJan-Gerard Cornelis Van Der Toorn, Paulus Martinus Hubertus Vissers
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Abstract
The present disclosure relates to a stage apparatus comprising: an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source, and an electric field shield configured to shield at least a part of the electrical connection.
Claims13
A stage apparatus comprising:
- an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source,
- an electric field shield configured to shield at least a part of the electrical connection, and
- a positioner comprising a first positioning module and a second positioning module,
- wherein the first positioning module is configured to position the object table and the second positioning module is configured to position the object table and the first positioning module,
- wherein the electric field shield is arranged between the electrical connection and a part of the second positioning module, and wherein the electrode is applied a first voltage by the power source and the part of the second positioning module is at a second voltage being different from the first voltage.
2 more elements
Dependencies are inferred from the claim text.