Evaluating a contact between a wafer and an electrostatic chuck

A device for evaluating a contact between a wafer and an electrostatic chuck, the device comprises:

• a processing circuit;
• and
• an electrostatic sensor that comprises a sensing element;
• wherein the electrostatic sensor is configured to monitor a charge at a point of measurement located at a front side of the wafer, at different points of time that follow a start of an introduction of a voltage difference between an absolute value of a negative pole of the electrostatic chuck coupled to a negative voltage source and an absolute value of a positive pole of the electrostatic chuck coupled to a positive voltage source, wherein the introduction occurs while the wafer is supported by the electrostatic chuck and is contacted by one or more conductive contact pins of the electrostatic chuck;
• and
• wherein the processing circuit is configured to determine an electrical parameter of the contact between the wafer and the electrostatic chuck, based on an outcome of a monitoring of the charge.

A non-transitory computer readable medium for evaluating a contact between a wafer and an electrostatic chuck, the non-transitory computer readable medium stores instructions for:

• introducing, while the wafer is supported by the electrostatic chuck and is contacted by one or more conductive contact pins of the electrostatic chuck, a voltage difference between an absolute value of a negative pole of the electrostatic chuck coupled to a negative voltage source and an absolute value of a positive pole of the electrostatic chuck coupled to a positive voltage source;
• monitoring, by an electrostatic sensor that comprises a sensing element, a charge at a point of measurement located at a front side of the wafer, at different points of time that follow a start of an introducing of the voltage difference, to provide monitoring results;
• and
• determining an electrical parameter of the contact between the wafer and the electrostatic chuck, based on the monitoring results.