Reflector and method of manufacturing a reflector
AssigneeASML Netherlands B.V.
InventorFerry Zijp
Life of this patent
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AssigneeASML Netherlands B.V.
InventorFerry Zijp
Estimating the term…
A reflector comprising a hollow body having an interior surface defining a passage through the hollow body, the interior surface having at least one optical surface part configured to reflect radiation and a supporter surface part, wherein the optical surface part has a predetermined optical power and the supporter surface part does not have the predetermined optical power. The reflector is made by providing an axially symmetric mandrel; shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel; forming a reflector body around the mandrel; and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
A method of manufacturing a reflector, the method comprising:
A method of manufacturing a plurality of reflectors, the method comprising:
Dependencies are inferred from the claim text.