Radiation source apparatus and method for using the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu
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Abstract
A radiation source apparatus includes a vessel, a laser source, a collector, and a reflective mirror. The vessel has an exit aperture. The laser source is at one end of the vessel and configured to excite a target material to form a plasma. The collector is disposed in the vessel and configured to collect a radiation emitted by the plasma and to direct the collected radiation to the exit aperture of the vessel. The reflective mirror is in the vessel and configured to reflect the laser beam toward an edge of the vessel.
Claims20
A radiation source apparatus, comprising:
- a vessel having an exit aperture;
- a laser source disposed at an end of the vessel and configured to emit a laser beam to excite a target material to form a plasma;
- a collector disposed in the vessel and configured to collect a radiation emitted by the plasma and to direct the collected radiation to the exit aperture of the vessel;
- and
- a reflective mirror in the vessel and configured to reflect the laser beam toward an edge of the vessel.
A radiation source apparatus, comprising:
- a vessel having an exit aperture;
- a laser source disposed at one end of the vessel and configured to emit a laser beam to excite a target material to form a plasma;
- a collector disposed in the vessel and configured to collect a radiation emitted by the plasma and to direct the collected radiation to the exit aperture of the vessel;
- a fuel receiving assembly surrounding the vessel;
- at least one drip pin connected to a bottom of the fuel receiving assembly;
- and
- a reflective mirror located in the vessel and configured to reflect the laser beam toward the at least one drip pin.
A method, comprising:
- generating a target droplet to a zone of excitation in a vessel;
- emitting a laser beam toward the zone of excitation, such that the target droplet is heated by the laser beam to generate radiation;
- and
- after the laser beam passes the zone of excitation, directing the laser beam toward a first edge of the vessel.
Dependencies are inferred from the claim text.