Superresolution metrology methods based on singular distributions and deep learning

A method for determining a value of a non-positional intrinsic geometrical parameter of a geometrical feature of a specified dimensionality characterizing a physical object, the intrinsic geometrical parameter being size of a point-object, the method comprising:

• a. projecting a singular light distribution characterized by a first wavelength and a position of singularity onto the physical object
• b. detecting light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector, the light constituting detected light;
• c. identifying and quantifying a return energy distribution at one or more positions of the singular light distribution as a quantification of the intrinsic geometrical parameter;
• and
• d. determining the value of the intrinsic geometrical parameter based on the value of the return energy distribution.

A method for determining a value of an intrinsic geometrical parameter of a geometrical feature of a specified dimensionality characterizing a physical object, the intrinsic geometrical parameter being ellipticity of a point-object, the method comprising:

• a. projecting a singular light distribution characterized by a first wavelength and a position of singularity onto the physical object
• b. detecting light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector, the light constituting detected light;
• c. identifying and quantifying a return energy distribution at one or more positions of the singular light distribution as a quantification of the intrinsic geometrical parameter;
• and
• d. determining the value of the intrinsic geometrical parameter based on the value of the return energy distribution.

A method for determining a value of a non-positional intrinsic geometrical parameter of a geometrical feature of a specified dimensionality characterizing a physical object, the intrinsic geometrical parameter characterizing a model shape of the geometrical feature, the method comprising:

• a. projecting a singular light distribution characterized by a first wavelength and a position of singularity onto the physical object
• b. detecting light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector, the light constituting detected light;
• c. identifying and quantifying a return energy distribution at one or more positions of the singular light distribution as a quantification of the intrinsic geometrical parameter;
• and
• d. determining the value of the intrinsic geometrical parameter based on the value of the return energy distribution.