System for deriving electrical characteristics and non-transitory computer-readable medium

A system that detects a defect of an electric circuit formed on a semiconductor wafer from a netlist including electrical characteristics of a circuit element and connection information between terminals and image data acquired from an image acquisition tool or characteristics extracted from the image data, the system being configured to be communicable with the image acquisition tool, the system comprising:

• a computer system;
• and
• an arithmetic module that is executed by the computer system,
• wherein the computer system
• receives image data obtained by sequentially irradiating a plurality of contacts included in a transistor provided on the semiconductor wafer with a beam from the image acquisition tool and extracts characteristics of the plurality of contacts from the received image data, the characteristics being included in the image data, or receives characteristics of the plurality of contacts from the image acquisition tool, the characteristics being extracted from the image data,
• receives one or more netlists, including the electrical characteristics of the circuit element and the connection information between the terminals, in which a relationship between an equivalent circuit of an electric circuit formed on the semiconductor wafer and defect information is described from a netlist database,
• estimates characteristics of the plurality of contacts from one or more netlists or estimates netlists based on characteristics of a plurality of contacts included in the image data,
• compares the characteristics of the plurality of contacts estimated from the netlists and the characteristics of the plurality of contacts extracted from the image data to each other or compares the netlists received from the netlist database and the netlists estimated based on the characteristics of the plurality of contacts included in the image data to each other, and
• outputs defect information described in a netlist selected based on the comparison.

A non-transitory computer-readable medium storing a program that is configured to instruct a processor to detect a defect of an electric circuit formed on a semiconductor wafer from a netlist including electrical characteristics of a circuit element and connection information between terminals, wherein the program is configured to instruct a processor

• to receive an image data obtained by sequentially irradiating a plurality of contacts included in a transistor provided on a semiconductor wafer with a beam from an image acquisition tool and to extract characteristics of a plurality of contacts included in the received image data from the image data, or to receive characteristics of a plurality of contacts extracted from the image data,
• to receive one or more netlists, including the electrical characteristics of the circuit element and the connection information between the terminals, in which a relationship between an equivalent circuit of an electric circuit formed on the semiconductor wafer and defect information is described from a netlist database,
• to estimate characteristics of the plurality of contacts from one or more netlists or estimate netlists based on characteristics of a plurality of contacts included in the image data,
• to compare the characteristics of the plurality of contacts estimated from the netlists and the characteristics of the plurality of contacts extracted from the image data to each other or compares the netlists received from the netlist database and the netlists estimated based on the characteristics of the plurality of contacts included in the image data to each other, and
• to output defect information described in a netlist selected based on the comparison.