Inspection apparatus and inspection method

An inspection apparatus for inspecting an object in which at least one of a plurality of light-emitting elements is formed, the inspection apparatus comprising:

• an excitation light source configured to generate excitation light to irradiate the object;
• an optical element configured to separate fluorescence from the object by transmitting and reflecting the fluorescence according to a wavelength;
• a first imager configured to image fluorescence reflected by the optical element;
• a second imager configured to image fluorescence transmitted through the optical element;
• and
• a processor configured to derive color irregularity information of the light-emitting element based on a first fluorescence image acquired by the first imager and a second fluorescence image acquired by the second imager,
• wherein an edge shift width of the optical element is wider than a full width at half maximum of a normal fluorescence spectrum of the light-emitting element, the edge shift width corresponding to a width of a wavelength band in which transmittance and reflectance of the optical element changes according to a change in wavelength of the optical element.