Method and electronic device for guiding semiconductor manufacturing process

An electronic device for guiding a semiconductor manufacturing process, the electronic device comprising:

• a display;
• at least one non-transitory computer-readable medium;
• and
• at least one processor configured to execute instructions stored in the at least one non-transitory computer-readable medium,
• wherein the at least one processor is further configured to:
• receive semiconductor manufacturing process data corresponding to a target semiconductor device;
• generate first semiconductor characteristic data corresponding to the semiconductor manufacturing process data by using a technology computer-aided design (TCAD) model, the TCAD model being trained through machine learning based on training data including information about a plurality semiconductor characteristics;
• generate second semiconductor characteristic data corresponding to the semiconductor manufacturing process data by using a compact model, the compact model being generated based on information of measurement of at least one semiconductor characteristic of a first semiconductor device;
• generate, based on the first semiconductor characteristic data and the second semiconductor characteristic data, a plurality of process policies corresponding to a plurality of strategic references by using a plurality of strategy models;
• and
• control the display to display at least one of the plurality of process policies as a process policy corresponding to the target semiconductor device,
• wherein the at least one processor is further configured to generate the plurality of process policies by performing:
• comparing the first semiconductor characteristic data and the second semiconductor characteristic data based on each of a plurality of reference characteristics, and outputting a plurality of comparison result data by determining data that conforms to each reference characteristic, of the plurality of reference characteristics, between the first semiconductor characteristic data and the second semiconductor characteristic data;
• and
• generating the plurality of process policies based on the plurality of comparison result data, according to the plurality of strategic references of the plurality of strategy models.

An electronic system for guiding a semiconductor manufacturing process, the electronic system comprising:

• a communication unit;
• a display;
• a processor configured to:
• receive semiconductor manufacturing process data corresponding to a target semiconductor device;
• output first semiconductor characteristic data corresponding to the semiconductor manufacturing process data by using a technology computer-aided design (TCAD) model, the TCAD model being trained through machine learning based on training data including TCAD simulation data;
• output second semiconductor characteristic data corresponding to the semiconductor manufacturing process data by using a compact model, the compact model being generated based on information of measurement of at least one semiconductor characteristic of a first semiconductor device;
• generate a plurality of process policies based on the first semiconductor characteristic data and the second semiconductor characteristic data;
• and
• a management device configured to receive user information from the processor and transmit, to the processor, information about an authority level corresponding to the user information,
• wherein the processor is further configured to control the display to display at least a part of the plurality of process policies based on the information about the authority level,
• wherein the processor is further configured to generate the plurality of process policies by performing:
• comparing the first semiconductor characteristic data and the second semiconductor characteristic data based on each of a plurality of reference characteristics, and outputting a plurality of comparison result data by determining data that conforms to each reference characteristic, of the plurality of reference characteristics, between the first semiconductor characteristic data and the second semiconductor characteristic data;
• and
• generating the plurality of process policies based on the plurality of comparison result data, according to the plurality of reference characteristics.