System and method for dynamically controlling temperature of thermostatic reticles

A system for dynamically controlling a temperature of a thermostatic reticle, comprising:

• a thermostatic reticle assembly, comprising:
• a reticle,
• at least one temperature sensor in proximity to the reticle, and
• at least one heating element;
• a thermostat component in communication with the at least one temperature sensor and the at least one heating element;
• and
• a controller comprising a processor in communication with memory storing instructions which are executed by the processor to:
• receive, from the at least one temperature sensor by the thermostat component, a current temperature of the reticle,
• retrieve, from an associated database, a steady-state temperature corresponding to the reticle, and
• activate, via the thermostat component, the at least one heating element in response to preheat the reticle to the retrieved steady-state temperature in accordance with the current temperature of the reticle,
• activate a gas flow valve positioned within a gas supply line subsequent to activating the at least one heating element, wherein the at least one heating element positioned adjacent to the gas supply line to heat a gas transiting therethrough, and
• closing the gas flow valve subsequent to deactivating the at least one heating element.

A computer-implemented method for dynamically controlling reticle temperature of a thermostatic reticle assembly, comprising:

• receiving, from at least one sensor, a current temperature of a reticle via a thermostat component;
• identifying, via a machine learning component, the reticle of the thermostatic reticle assembly and a recipe using the reticle in EUV lithography;
• retrieving, from an associated database, a steady-state temperature associated with the identified reticle and recipe;
• activating at least one heating element in proximity to the reticle;
• activating a gas flow valve positioned within a gas supply line subsequent to activating the at least one heating element, wherein the at least one heating element is positioned adjacent to the gas supply line to heat a gas transiting therethrough;
• receiving, from the at least one sensor, a temperature of the reticle subsequent to activating the at least one heating element;
• deactivating the at least one heating element responsive to the temperature of the reticle reaching the steady-state temperature;
• closing the gas flow valve subsequent to deactivating the at least one heating element;
• receiving, from the at least one sensor, a temperature of the reticle after deactivating the at least one heating element;
• comparing the temperature of the reticle after deactivating the at least one heating element to the steady-state temperature;
• and
• activating a chiller component in response to a result of the comparison.