Liquid processing apparatus, liquid processing method, and computer-readable recording medium

A liquid processing apparatus, comprising:

• a substrate holder configured to hold a substrate;
• a processing liquid supply configured to supply a processing liquid onto a front surface of the substrate, the processing liquid supply comprising a processing liquid supply nozzle;
• a gas supply configured to supply a gas onto the front surface of the substrate;
• and a controller, wherein the gas supply comprises a diffusion nozzle which is different from the processing liquid supply nozzle and provided with multiple discharge openings respectively elongated at different angles with respect to the front surface of the substrate, and the controller performs controlling the gas supply to jet the gas from the diffusion nozzle onto a top surface of the processing liquid and above a region of the front surface of the substrate including at least a central portion thereof in a state that the processing liquid has been supplied on the front surface of the substrate, and controlling the processing liquid supply and the gas supply not to perform the supplying of the processing liquid and the jetting of a gas at the same time, wherein the diffusion nozzle has a leading end portion which is provided with the multiple discharge openings and is of a hemispherical shape.