Photoacid generator, photoresist composition including the same, and method of preparing the photoacid generator
AssigneeSamsung Electronics Co., Ltd.
InventorsEunkyung Lee, Sumin Kim, Hyunwoo Kim, Juhyeon Park, Giyoung Song, Sukkoo Hong, Yoonhyun Kwak, Youngmin Nam, Byunghee Sohn, Sunyoung Lee, Aram Jeon, Sungwon Choi
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Abstract
Disclosed are a photoacid generator, a photoresist composition including the same, and a method of preparing the photoacid generator. The photoacid generator may include a compound represented by Formula 1: wherein, in Formula 1, CY, A1, A2, and B are respectively described in the specification.
Claims20
A photoacid generator comprising a compound represented by Formula 1:
- wherein, in Formula 1,
- CY is an unsubstituted C6-C10 aromatic ring group, a C6-C10 aromatic ring group substituted with a halogen atom, a C1-C30 alkyl group, or a C1-C30 haloalkyl group,
- A1 and A2 are each independently a substituted C6-C60 aromatic ring group with at least one iodine atom, a substituted C5-C60 heteroaromatic ring group with at least one iodine atom, or A1 and A2 join to form a ring system substituted with at least two iodine atoms, and
- B is a counter anion.
A photoacid generator comprising a cation represented by any one of cations 1 to 45;
- and a counter anion
A method of preparing a photoacid generator, the method comprising:
- preparing a cation moiety of a photoacid generator, represented by Formula 10, through an electrophilic aromatic substitution reaction of a compound represented by Formula 9:
- wherein, in Formula 9,
- A3 and A4 are each independently a substituted C6-C60 aromatic ring group with at least one iodine atom, a substituted C5-C60 heteroaromatic ring group with at least one iodine atom, or A3 and A4 join to form a ring system substituted with at least two iodine atoms,
- wherein, in Formula 10,
- CY1 is an unsubstituted C6-C10 aromatic ring group, or a C6-C10 aromatic ring group substituted with a halogen atom, a C1-C30 alkyl group, or a C1-C30 haloalkyl group,
- A5 and A6 are each independently a substituted C6-C60 aromatic ring group with at least one iodine atom, or a substituted C5-C60 heteroaromatic ring group with at least one iodine atom, or A5 and A6 join to form a ring system substituted with at least two iodine atoms, and
- Tf is (CF2SO2)2O.
Dependencies are inferred from the claim text.