Reticle pod for preventing haze contamination and reticle stocker having the same

A reticle pod for accommodating a reticle assembly, wherein the reticle assembly comprises a reticle and a pellicle covering the reticle, and the reticle pod comprising:

• a box frame configured to accommodate the reticle assembly;
• a plurality of reticle supports disposed in the box frame and configured to support the reticle assembly;
• and
• an electrostatic generator coupled to the reticle assembly and configured to generate static electricity to the reticle assembly, and the static electricity alternates between positive electricity and negative electricity, so that the reticle and the pellicle carry static charges with the same polarity when the electrostatic generator alternatively generates positive static electricity and negative static electricity.

A method of storing a plurality of reticle assemblies, wherein each of the reticle assemblies comprises a reticle and a pellicle covering the reticle, and the method comprising actions of:

• providing a stocker for accommodating a plurality of reticle pods, wherein each of the reticle pods is configured to accommodate one of the reticle assemblies, the stocker comprises a main frame having an inner space, at least one pod support disposed in the inner space, and an electrostatic generator coupled to each of the reticle assemblies, and the pod support divides the inner space into a plurality of chambers configured to respectively accommodate the plurality of reticle pods;
• generating static electricity to each of the reticle assemblies by the electrostatic generator;
• and
• alternating the static electricity between positive electricity and negative electricity, the reticle and the pellicle carrying static charges with the same polarity.