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US 11,693,290 B2Granted
Optical waveguide device
AssigneeFujitsu Optical Components Limited
InventorsShuntaro Makino, Yoshinobu Kubota, Yasuhiro Ohmori, Masaharu Doi, Teruo Kurahashi, Shintaro Takeuchi
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Abstract
An optical waveguide device includes a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked; an optical waveguide formed in the thin-film LN layer; and a plurality of electrodes near the optical waveguide. The intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 of group 18 of a periodic table of elements.
Claims13
An optical waveguide device, comprising:
- a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked;
- an optical waveguide formed in the thin-film LN layer;
- and
- a plurality of electrodes near the optical waveguide,
- wherein,
- the intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 to group 18 of a periodic table of elements,
- the electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer;
- the thin-film LN layer has a plurality of steps provided therein at a predetermined depth from the surface of the buffer layer, and
- the electrodes are disposed so that the bottom surfaces thereof are on the steps, respectively.
6 more elements
An optical waveguide device, comprising:
- a substrate on which an intermediate layer, a thin-film LN layer of lithium niobate, and a buffer layer are stacked;
- an optical waveguide formed in the thin-film LN layer;
- and
- a plurality of electrodes near the optical waveguide,
- wherein
- the intermediate layer and the buffer layer contain a same material of a metal element of any one of group 3 to group 18 of a periodic table of elements,
- the electrodes are disposed so that respective bottom surfaces thereof are at positions lower than a position of a surface of the buffer layer;
- the intermediate layer has a plurality of steps provided therein at a predetermined depth from the surface of the buffer layer, and
- the electrodes are disposed so that the bottom surfaces thereof are on the steps, respectively.
6 more elements
Dependencies are inferred from the claim text.