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US 11,693,232 B2Granted
Laser beam irradiation apparatus
AssigneeSamsung Display Co., Ltd.
InventorsGyoo-Wan Han, Ku-Hyun Kang, Hae-Sook Lee, Jin-Hong Jeun, Kyoung-Seok Cho
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Abstract
A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.
Claims14
A laser beam irradiation apparatus, comprising:
- a laser light source for generating a first Gaussian beam;
- a controller, including an acusto-optic modulator (AOM), for receiving the first Gaussian beam, controlling energy of light of the first Gaussian beam, and emitting a second Gaussian beam;
- a first optical system for adjusting a shape of light of the second Gaussian beam, the first optical system comprising:
- a slit for directly receiving the second Gaussian beam from the controller and transmitting only a center portion of the second Gaussian beam, and
- a reducer for directly receiving light emitted from the slit and reducing a size of a cross section of light emitted from the slit;
- a scanner for directly receiving light emitted from the reducer and adjusting a direction of the light emitted from the reducer;
- and
- an F-theta lens for diminishing a beam emitted from the scanner.
5 more elements
A laser beam irradiation apparatus, comprising:
- a laser light source for generating a first Gaussian beam;
- a controller, including an acusto-optic modulator (AOM), for receiving the first Gaussian beam, controlling energy of light of the first Gaussian beam, and emitting a second Gaussian beam;
- a first optical system for adjusting a shape of light of the second Gaussian beam, the first optical system comprising:
- a slit for directly receiving the second Gaussian beam from the controller and transmitting only a center portion of the second Gaussian beam, and
- a homogenizer for receiving light emitted from the slit and converting the light emitted from the slit into a flat-top beam;
- a scanner for adjusting a direction of light emitted from the first optical system;
- and
- an F-theta lens for diminishing a beam emitted from the scanner,
- wherein the first optical system further comprises a convex lens for converting, together with the homogenizer, the light emitted from the slit into the flat-top beam.
6 more elements
A laser beam irradiation apparatus, comprising:
- a laser light source for generating a first Gaussian beam;
- a controller for receiving the first Gaussian beam, controlling energy of light of the first Gaussian beam, and emitting a second Gaussian beam;
- a first optical system for adjusting a shape of light of the second Gaussian beam, the first optical system comprising:
- a slit for directly receiving the second Gaussian beam from the controller and transmitting only a center portion of the second Gaussian beam, and
- an adjustable zoom beam expander for directly receiving light emitted from the slit and adjusting a size of a cross section of light emitted from the slit;
- a scanner for directly receiving light emitted from the zoom beam expander and adjusting a direction of the light emitted from the zoom beam expander;
- and
- an F-theta lens for diminishing a beam emitted from the scanner.
5 more elements
Dependencies are inferred from the claim text.