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US 11,693,187 B2Granted
Multi-axis MEMS mirror parking
AssigneeGoogle Inc.
InventorsHsing Cheng, Kevin Yasumura
Life of this patent
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AssigneeGoogle Inc.
InventorsHsing Cheng, Kevin Yasumura
Estimating the term…
The present disclosure provides an improved method of parking a microelectromechanical system (MEMS) mirror in an array of MEMS mirrors to protect against single high voltage channel failures in a driver. Two separate voltages are applied to each MEMS mirror to move and park the mirror out of a camera sensor field of view in a servo system. For example, a first voltage may be applied in a positive X direction and a second voltage may be applied in a positive Y direction which will move the mirror in a diagonal direction. If one of the high voltage channels fail, the mirror will still be parked and outside of the camera sensor field of view. If a high voltage channel fails, the servo system can park a mirror affected by the failure in an opposite corner. Moreover, if 2-axis parking is not feasible, the mirror can use single-voltage parking.
A method for configuring an optical circuit switch (OCS), comprising:
An optical communication system comprising:
A non-transitory computer-readable medium storing instructions executable by one or more processors for performing a method of parking a selected microelectromechanical system (MEMS) mirror in a plurality of MEMS mirrors, the method comprising:
Dependencies are inferred from the claim text.