Waveguide attenuator
AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Won Suk Lee, Abdelsalam A. Aboketaf
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to waveguide attenuators and methods of manufacture. The structure includes: a main bus waveguide structure; a first hybrid waveguide structure evanescently coupled to the main bus waveguide structure and comprising a first geometry of material; and a second hybrid waveguide structure evanescently coupled to the main bus waveguide structure and comprising a second geometry of the material.
Claims19
A structure, comprising a hybrid attenuator comprising waveguide structures that evanescently couple to a main bus waveguide, wherein each waveguide structure of the hybrid attenuator have different geometries and associated materials structured in a way that results in transverse-electric (TE) mode and transverse-magnetic (TM) mode attenuation.
A structure comprising:
- a first waveguide structure which is partially coated with a polarization-independent transparent conductive material;
- and
- a second waveguide structure which is partially coated with the polarization-independent transparent conductive material, differently than the first waveguide structure,
- wherein the polarization-independent transparent conductive material has a geometry that attenuates a transverse-electric (TE) mode of transmission for the first waveguide structure and attenuates a transverse-magnetic (TM) mode of transmission for the second waveguide structure.
A structure, comprising:
- a first hybrid waveguide structure comprising semiconductor material monolithically integrated into SOI technology, the first hybrid waveguide structure further comprising a partial coating of vanadate based material which has a first geometry structured to prevent reflection back to a main bus waveguide structure;
- and
- a second hybrid waveguide structure comprising the semiconductor material monolithically integrated into the SOI technology, the second hybrid waveguide structure further comprising a partial coating of vanadate based material which has a geometry different than the first geometry and which is structured to prevent reflection back to the main bus waveguide structure.
Dependencies are inferred from the claim text.