US 11,693,180 B2 · Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Abstract

An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.

Claims24

Dependent claims

An apparatus comprising:

a buried oxide layer disposed on a substrate;
a microring resonator disposed on the buried oxide layer and within a bonded semiconductor layer;
an optical waveguide disposed on the buried oxide layer within the bonded semiconductor layer and optically coupled to the microring resonator, wherein the optical waveguide is to input a first optical wave into the microring resonator;
an oxide layer deposited on top of the optical waveguide and on top of the microring resonator;
and
a set of electrodes disposed adjacent to the microring resonator and comprising:
an inner electrode disposed on the buried oxide layer and offset from an inside of the microring resonator;
an outer electrode disposed on the buried oxide layer and offset from an outside of the microring resonator;
and
a top electrode disposed on top of the deposited oxide layer and located centrally above the microring resonator.

7 more elements

An optical modulator comprising:

an optical waveguide disposed on a buried oxide layer;
a microring resonator disposed on the buried oxide layer and optically coupled to the optical waveguide;
a first vertical grating coupler coupled to an input port of the optical waveguide, the first vertical grating coupler being coupled to an optical source, wherein the optical source is to generate a first optical wave;
a second vertical grating coupler coupled to an output port of the optical waveguide to output a second optical wave, the second optical wave resulting from an interaction between the first optical wave and the microring resonator;
a first electrode disposed on the buried oxide layer and coupled to a ground potential;
and
a second electrode disposed on top of the buried oxide layer and coupled to a signal terminal, wherein a voltage potential is to be applied between the first electrode and the second electrode to modulate the first optical wave into the second optical wave within the microring resonator.

4 more elements

Dependencies are inferred from the claim text.

Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Life of this patent

Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Life of this patent

Abstract

Claims24