Optical scanning device, optical measuring apparatus, and robot
AssigneeSeiko Epson Corporation
InventorHirokazu Yamaga
Life of this patent
Estimating the term…
Abstract
An optical scanning device includes a light source unit having a light exiting portion from which a light is output, a scanning unit having a mirror supported by a supporting part and reflecting the light output from the light exiting portion while swinging the mirror around a swing axis, and a housing having an enclosed space partitioned by a plurality of wall portions including a first wall portion and a second wall portion, in which the light exiting portion and the scanning unit are placed in the enclosed space, wherein the first wall portion transmits the light reflected by the scanning unit, and the second wall portion includes a part of the light source unit.
Claims8
An optical scanning device comprising:
- a light source unit having a light exiting portion from which a light is output;
- a scanning unit having a mirror supported by a supporting part and reflecting the light output from the light exiting portion while swinging the mirror around a swing axis;
- and
- a housing having an enclosed space partitioned by a plurality of wall portions including a first wall portion and a second wall portion, in which the light exiting portion and the scanning unit are placed in the enclosed space, wherein
- the first wall portion transmits the light reflected by the scanning unit, and
- the second wall portion includes a part of the light source unit,
- wherein the scanning unit has a permanent magnet placed on the back surface of the mirror, and an electromagnetic coil placed to face the permanent magnet, and
- the scanning unit has a first member on which the supporting part is placed, a second member coupled to the first member, a third member coupled to the second member, and the electromagnetic coil is placed between the first member and the third member.
Dependencies are inferred from the claim text.