Bode fingerprinting for characterizations and failure detections in processing chamber

A method comprising:

• injecting, by a signal generator of a chamber signal manager, an alternating signal wave into a control flow of the chamber signal manager;
• inputting, into a feedback controller of the chamber signal manager, a difference between a pressure setpoint and a pressure measurement value, which is measured within a processing chamber coupled to the chamber signal manager;
• adjusting, by the feedback controller, pressure dynamics within the processing chamber in response to the difference;
• and
• sending, by the chamber signal manager, the alternating signal wave and the pressure measurement value to a diagnostic server to generate a baseline bode fingerprint to be used in performing diagnostics of the processing chamber.

A method comprising:

• receiving, from a processing chamber, measurement values of combined signals that are based on an injection of alternating signal waves, of differing amplitudes, onto an output signal of a controller of the processing chamber;
• conducting frequency distortion analysis to measure energy of the combined signals at different harmonic frequencies;
• generating, based on results of the frequency distortion analysis, updated bode fingerprints that characterizes a processing system comprising the processing chamber;
• comparing the updated bode fingerprints with one or more baseline bode fingerprints to generate difference values between respective updated bode fingerprints and respective one or more baseline bode plot fingerprints;
• and
• determining whether to generate an alert or fault in response to the difference values.