Environment forming apparatus, program, and method for controlling blower fan

A computer-readable recording medium recording a program for causing a computer to function as a setting unit, the computer that controls an environment forming apparatus including an environment forming chamber in which an object for which processing is to be executed is accommodated, an air conditioning chamber that communicates with the environment forming chamber, an air conditioning unit that is disposed in the air conditioning chamber and generates air-conditioned air by adjusting an environmental element of air, a plurality of blower fans that circulate the air-conditioned air between the air conditioning chamber and the environment forming chamber, and a plurality of measurement units that measure the environmental element at a plurality of locations in the environment forming chamber and output a plurality of measurement values,

• wherein the setting unit
• is capable of individually setting rotation speed of each blower fan of the plurality of blower fans,
• changes rotation speed of the plurality of blower fans a plurality of times and acquires the plurality of measurement values after each change in a setting period before a processing period in which the processing is executed, and
• executes setting processing for setting rotation speed of the each blower fan in the processing period based on the plurality of measurement values having been acquired.

A method for controlling a blower fan in an environment forming apparatus including an environment forming chamber in which an object for which processing is to be executed is accommodated, an air conditioning chamber that communicates with the environment forming chamber, an air conditioning unit that is disposed in the air conditioning chamber and generates air-conditioned air by adjusting an environmental element of air, a plurality of blower fans that circulate the air-conditioned air between the air conditioning chamber and the environment forming chamber, a plurality of measurement units that measure the environmental element at a plurality of locations in the environment forming chamber and output a plurality of measurement values;

• and a setting unit that is capable of individually setting rotation speed of each blower fan of the plurality of blower fans,
• wherein the setting unit
• changes rotation speed of the plurality of blower fans a plurality of times and acquires the plurality of measurement values after each change in a setting period before a processing period in which the processing is executed, and
• executes setting processing for setting rotation speed of the each blower fan in the processing period based on the plurality of measurement values having been acquired.