Inertial sensor and inertial measurement unit

An inertial sensor comprising:

• a substrate;
• a first movable body disposed above the substrate and configured to swing around a first rotation axis along a first direction;
• a first support beam supporting the first movable body as the first rotation axis;
• and
• a lid bonded to the substrate and covering the first movable body and the first support beam, wherein
• the first movable body has an opening, the opening being substantially cross-shaped and extending along the first direction and a second direction perpendicular to the first direction, the opening being located between the first support beam and one end of the first movable body along the second direction,
• a contour of the opening surrounds:
• a second movable body configured to swing around a second rotation axis along the second direction, the second movable body extending along the first direction;
• a second support beam coupling the first movable body and the second movable body and supporting the second movable body as the second rotation axis;
• a third movable body configured to swing around a third rotation axis along the second direction, the third movable body extending along the first direction;
• and
• a third support beam coupling the first movable body and the third movable body and supporting the third movable body as the third rotation axis, and
• a protrusion is provided at a surface of the substrate or the lid facing one of the second movable body and the third movable body,
• the protrusion overlaps with one of the second movable body and the third movable body in a plan view, and
• the protrusion protrudes toward one of the second movable body and the third movable body.

An inertial sensor comprising:

• a substrate;
• a first movable body disposed above the substrate and configured to swing around a first rotation axis along a first direction;
• a first support beam supporting the first movable body as the first rotation axis;
• and
• a lid bonded to the substrate and covering the first movable body and the first support beam, wherein
• the first movable body has an opening, the opening being substantially cross-shaped and extending along the first direction and a second direction perpendicular to the first direction, the opening being located between the first support beam and one end of the first movable body along the second direction,
• a contour of the opening surrounds:
• a second movable body configured to swing around a second rotation axis along the second direction, the second movable body extending along the first direction;
• a second support beam coupling the first movable body and the second movable body and supporting the second movable body as the second rotation axis;
• a third movable body configured to swing around a third rotation axis along the second direction, the third movable body extending along the first direction;
• and
• a third support beam coupling the first movable body and the third movable body and supporting the third movable body as the third rotation axis, and
• a protrusion is provided at the second movable body and the third movable body,
• the protrusion overlaps with one of the second movable body and the third movable body in a plan view, and
• the protrusion protrudes toward a surface of the substrate or the lid facing the second movable body and the third movable body.