Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor

A method comprising:

• affixing a piezoelectric membrane to a holder of a MEMS device;
• affixing an inertial mass to the piezoelectric membrane;
• affixing a plurality of segmented electrodes to the piezoelectric membrane;
• and
• using the segmented electrodes, generating a plurality of segment signals in response to an acceleration of the MEMS device,
• wherein at least one of the plurality of segmented electrodes comprises four segmentation zones,
• wherein, in a determined X-direction acceleration, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and
• wherein, in a determined Y-direction acceleration, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

A method comprising:

• providing a MEMS device having a piezoelectric membrane;
• attaching an inertial mass to the piezoelectric membrane;
• attaching first, second, third, and fourth electrode segments to the piezoelectric membrane;
• generating a first signal from the first electrode segment;
• generating a second signal from the second electrode segment;
• generating a third signal from the third electrode segment;
• and
• generating a fourth signal from the fourth electrode segment,
• wherein the first segmented electrode comprises a plurality of high top side electrode segments and a plurality of low top side electrode segments laterally spaced apart from each other, and
• wherein the second segmented electrode comprises a plurality of high top side electrode segments and a plurality of low top side electrode segments laterally spaced apart from each other,
• wherein, in a determined X-direction acceleration, the first signal is equal to the third signal, the second signal is equal to the fourth signal, and the first signal and the second signal have opposite signs, and
• wherein, in a determined Y-direction acceleration, the first signal is equal to the second signal, the third signal is equal to the fourth signal, and the first signal and the third signal have opposite signs.