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US 11,692,963 B2Granted
Microfabricated electrochemical gas sensor
OwnerYue Huang, Stanley Zuoinventors
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Abstract
A microfabricated electrochemical gas sensor is disclosed. The sensor includes electrodes produced from conductor layers, a capping layer, microcavities through the conductor layers and the capping layer, a cavity connecting the microcavities, and an electrolyte filling in the space created by the cavity and the microcavities in the substrate. The microcavities allow gases to pass through but retain the electrolyte through surface tension.
Claims12
An electrochemical gas sensor comprising:
- a substrate comprising a top surface and a bottom surface;
- and
- a layer stack on the top surface of the substrate, wherein a plurality of electrodes resides in one or more conductor layers, wherein a dielectric layer insulates the substrate, wherein a dielectric layer insulates two adjacent conductor layers, and wherein there is a capping layer;
- and
- one or more microcavities penetrating through the layer stack from the capping layer down into the substrate;
- and
- a cavity penetrating through the substrate from the bottom surface of the substrate, wherein the cavity connects to the one or more microcavities in the substrate;
- and
- an electrolyte housed by the cavity and the one or more microcavities, wherein the electrolyte connects the electrodes, and wherein the electrolyte is held by its surface tension on the capping layer surface in the one or more microcavities.
6 more elements
Dependencies are inferred from the claim text.