Drive and sense stress relief apparatus
AssigneeAnalog Devices, Inc.
InventorGaurav Vohra
Life of this patent
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Abstract
A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
Claims20
A microelectromechanical systems (MEMS) device comprising:
- a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis;
- a movable drive structure coupled to the mass and configured to move along the first axis, wherein movement of the drive structure along the first axis causes movement of the mass along the first axis;
- and
- a stress relief structure comprising a frame coupled to the movable drive structure, wherein the frame comprises:
- a plurality of L-shaped beams including a first L-shaped beam coupled to the movable drive structure at at least one first point and a second L-shaped beam coupled to the movable drive structure at at least one second point;
- and
- a plurality of U-shaped beams including a first U-shaped beam coupled to a vertex of the first L-shaped beam and a second U-shaped beam coupled to a vertex of the second L-shaped beam.
A microelectromechanical systems (MEMS) device comprising:
- a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis;
- a movable drive structure coupled to the mass and configured to move along the first axis, wherein movement of the movable drive structure along the first axis causes movement of the mass along the first axis;
- a movable sense structure coupled to the mass and configured to detect motion of the mass along the second axis, wherein movement of the mass along the second axis causes movement of the movable sense structure along the second axis;
- a stress relief structure coupled to one of the movable drive structure or the movable sense structure;
- and
- at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
A microelectromechanical systems (MEMS) device comprising:
- a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis;
- a movable sense structure coupled to the mass and configured to detect motion of the mass along the second axis, wherein movement of the mass along the second axis causes movement of the movable sense structure along the second axis;
- a stress relief structure coupled to the movable sense structure, the stress relief structure comprising:
- a frame comprising:
- a plurality of L-shaped beams including a first L-shaped beam and a second L-shaped beam;
- and
- a plurality of U-shaped beams including a first U-shaped beam coupled to a vertex of the first L-shaped beam and a second U-shaped beam coupled to a vertex of the second L-shaped beam, wherein
- the frame exhibits rotational symmetry within an x-y plane.
Dependencies are inferred from the claim text.