Acoustic sensor having waveguide and inspection device

Abstract

A sensor includes a first element part having a first member and a first element. The first member is a acoustic tubular waveguide and extends along a first direction. The acoustic tubular waveguide includes a first opening and a second opening. A direction from the second opening toward the first opening is along the first direction. The first element includes a vibratile first membrane, and a first supporter supporting the first membrane. The second opening is between the first opening and the first membrane in the first direction. The sensor may be a Piezoelectric Micro electro mechanical systems Ultrasonic Transducer and may be used for inspecting paper and/or resin including detecting thickness of a fed through banknote and/or the presence of foreign matter thereon such as tape. An optical element may alternatively measure the vibration of a membrane from acoustic through transmission instead of an acoustic receiver.

Dependencies are inferred from the claim text.