Valve device
AssigneeTokyo Electron Limited
InventorsKei Kobayashi, Takehiko Arita
Life of this patent
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Abstract
A temperature control fluid is introduced through a first port. The temperature control fluid introduced into the first port is discharged through a second port. A piston is configured to be moved by a pressure to open or close a path connecting the first port and the second port. A pressure control space is provided at at least one side of a moving direction of the piston when the path is opened or closed. Air is supplied into the pressure control space through a third port. A leak portion communicates with the pressure control space, and allows the air supplied into the pressure control space to leak therethrough.
Claims4
A valve device, comprising:
- a first port through which a temperature control fluid is introduced;
- a second port through which the temperature control fluid introduced into the first port is discharged;
- a piston configured to be moved by a pressure to open or close a path connecting the first port and the second port;
- a first pressure control space provided at a first side of a moving direction of the piston when the path is opened or closed;
- a first air inlet port through which air is supplied into the first pressure control space;
- a first leak portion communicating with the first pressure control space, and allowing the air supplied into the first pressure control space to leak therethrough;
- a second pressure control space provided at a second side of the moving direction of the piston;
- a second leak portion communicating with the second pressure control space;
- and
- a second air inlet port through which air is supplied into the second pressure control space;
- and
- an air supply pipeline to supply the air to the first air inlet port, the air supply pipeline having a pipeline leak portion, through which the air leaks to an outside,
- wherein the first leak portion is provided at a side of the first pressure control space opposite from a side on which the first air inlet port is provided,
- a diameter of the first leak portion is smaller than a diameter of the first air inlet port, and
- wherein the first leak portion and the second leak portion are always open to the atmosphere regardless of air supplied into the first pressure control space.
A valve device, comprising:
- a first port through which a temperature control fluid is introduced;
- a second port through which the temperature control fluid introduced into the first port is discharged;
- a piston configured to be moved by a pressure to open or close a path connecting the first port and the second port;
- a first pressure control space provided at a first side of a moving direction of the piston when the path is opened or closed;
- a first air inlet port through which air is supplied into the first pressure control space;
- a first leak portion communicating with the first pressure control space, and allowing the air supplied into the first pressure control space to leak therethrough;
- a second pressure control space provided at a second side of the moving direction of the piston;
- a second leak portion communicating with the second pressure control space;
- and
- a second air inlet port through which air is supplied into the second pressure control space,
- wherein the first leak portion is provided at a side of the first pressure control space opposite from a side on which the first air inlet port is provided, and
- wherein the first leak portion and the second leak portion are always open to the atmosphere regardless of air supplied into the first pressure control space.
Dependencies are inferred from the claim text.