System for surface modification by laser diffusion

A system for forming a surface modified substrate, the system comprising:

• at least one laser source configured to generate a Gaussian laser beam;
• a translation stage;
• a controller coupled to the translation stage;
• a single sealed laser processing chamber mounted onto the translation stage and including
• a substrate receiving support,
• an optical window for transmitting the Gaussian laser beam to the substrate receiving support, and
• an inlet for receiving a precursor gas comprising metal organic molecules including at least one metal;
• at least one vacuum pump coupled to the single sealed laser processing chamber, the single sealed laser processing chamber being vacuum sealed;
• the controller configured to cause the translation stage to control a position of the Gaussian laser beam for scanning the Gaussian laser beam relative to a substrate of material via two dimensional movement and in a predetermined spatial pattern, the predetermined spatial pattern comprising a frequency selective surface (FSS) pattern, the substrate having a bulk portion, an outer surface integrated with the bulk portion, and a coating including the metal organic molecules including the at least one metal on the outer surface, the metal organic molecules being deposited on the outer surface from the precursor gas;
• the at least one laser source configured to
• decompose the metal organic molecules at laser-heated spots to form the at least one metal, and
• diffuse the at least one metal into the substrate with a diffusivity of X based upon a non-random polarization the at least one laser source;
• a beam expander coupled between the at least one laser source and the optical window;
• a linear polarizer coupled downstream from the beam expander;
• a phase plate coupled downstream from the linear polarizer;
• and
• a beam shaping lens coupled downstream from the phase plate and configured to transform the Gaussian laser beam into a linearly polarized flat-top laser beam;
• wherein the laser-heated spots atoms of the at least one metal diffuse into the outer surface to form at least one modified surface layer including the bulk portion and the at least one metal;
• wherein the at least one modified surface layer has a thickness of at least 1 nm;
• and
• wherein a 25° C. electrical conductivity of the at least one modified surface layer is at least 2.5% above or 2.5% below a 25° C. electrical conductivity in the bulk portion.