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US 11,692,117 B2Granted
Rare earth regenerator material particle, rare earth regenerator material particle group, and cold head, superconducting magnet, examination apparatus, and cryopump using the same
AssigneesKabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
InventorsKatsuhiko Yamada, Keiichi Fuse
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Abstract
A rare earth regenerator material particle and a regenerator material particle group having a high long-term reliability, and a superconducting magnet, an examination apparatus, a cryopump and the like using the same are provided. A rare earth regenerator material particle contains a rare earth element as a constituent component, and in the particle, a peak indicating a carbon component is detected in a surface region by an X-ray photoelectron spectroscopy analysis.
Claims10
A pulse type refrigerator, comprising:
- a regenerator container;
- and
- a plurality of regenerator material particle groups which are different in kind, and are filled in the regenerator container while being divided from each other,
- wherein at least one of the plurality of regenerator material particle groups comprises a rare earth generator material particle containing a rare earth element,
- a peak indicating a carbon component and a peak indicating a compound containing the rare earth element and oxygen are detected in a surface region of the rare earth generator material particle by an X-ray photoelectron spectroscopy analysis,
- an entire content of carbon in the rare earth generator material particle including the carbon component is 5 mass ppm or more and 100 mass ppm or less, and
- the carbon component detected in the surface region of the rare earth generator material particle has at least one selected from the group consisting of a C—C bond, a C—H bond, a C—O bond, a C=O bond, and an O—C=O bond.
4 more elements
Dependencies are inferred from the claim text.