1,1,1-tris(organoamino)disilane compounds and method of preparing same
AssigneeJiangsu Nata Opto-Electronic Materials Co. Ltd.
InventorsByung K. Hwang, Xiaobing Zhou
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AssigneeJiangsu Nata Opto-Electronic Materials Co. Ltd.
InventorsByung K. Hwang, Xiaobing Zhou
Estimating the term…
A 1,1,1-tris(organoamino)disilane compound and a method of preparing the 1,1,1-tris(organoamino)disilane compound are disclosed. The method comprises aminating a 1,1,1-trihalodisilane with an aminating agent comprising an organoamine compound to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound. A film-forming composition is also disclosed. The film-forming composition comprises the 1,1,1-tris(organoamino)disilane compound. A film formed with the film-forming composition, and a method of forming the film, are also disclosed. The method of forming the film comprises subjecting the film-forming composition comprising the 1,1,1-tris(organoamino)disilane compound to a deposition condition in the presence of a substrate, thereby forming the film on the substrate.
A 1,1,1-tris(organoamino)disilane compound having the following formula:
A method of preparing a 1,1,1-tris(organoamino)disilane compound, said method comprising:
A reaction product comprising a 1,1,1-tris(organoamino)disilane compound, wherein the reaction product comprising the 1,1,1-tris(organoamino)disilane compound is formed by a method comprising:
Dependencies are inferred from the claim text.