Film-forming material and film
AssigneeNippon Yttrium Co., Ltd.
InventorsNaoki Fukagawa, Ryuichi Sato
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Abstract
A coating material containing an oxyfluoride of yttrium and having a Fisher diameter of 1.0 to 10 μm and a tap density TD to apparent density AD ratio, TD/AD, of 1.6 to 3.5. The coating material preferably has a pore volume of pores with a diameter of 100 μm or smaller of 1.0 cm3/g or less as measured by mercury intrusion porosimetry. A coating containing an oxyfluoride of yttrium and having a Vickers hardness of 200 HV0.01 or higher. The coating preferably has a fracture toughness of 1.0×102 Pa·m1/2 or higher.
Claims10
A coating comprising an oxyfluoride of yttrium, the coating having a Vickers hardness od 200 HV0.01 or higher, the coating having not greater than ten projections per 1.0 cm×1.0 cm area thereof,
- wherein each of the projections has at least one width dimension of at least 5 μm, and
- the width dimension is measured in a direction parallel to a surface of the coating wherein the coating is an ion plated coating.
Dependencies are inferred from the claim text.