Synthesis of trichlorosilane from tetrachlorosilane and hydridosilanes
AssigneeMomentive Performance Materials Inc.
InventorsNorbert Auner, Alexander G Sturm
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Abstract
The invention relates to a process for the preparation of trichlorosilane (HSiCl3) which comprises the reaction of tetrachlorosilane (SiCU) with hydridosilanes in the presence of a catalyst.
Claims17
A process for the preparation of trichlorosilane (HSiCl3) comprising reacting tetrachlorosilane (SiCl4) with at least one hydridosilane in the presence of at least one catalyst, wherein the hydridosilanes are selected from the group consisting of MeSiH3, Me3SiH, Me2SiH2, Et2SiH2, Me2SiHCl, PhSiH3, Ph2SiH2, PhMeSiH2, iPr2SiH2, Hex2SiH2, tBu2SiH2, Me2Si(OEt)H, ViSiH3, ViMeSiH2, Me2HSi—SiHMe2, MeH2Si—SiH2Me, MeH2Si—SiHMe2, Me3Si—SiHMe2, and Me3Si—SiH2Me.
A process for the preparation of trichlorosilane (HSiCl3) comprising reacting tetrachlorosilane (SiCl4) with at least one hydridosilane in the presence of at least one catalyst, wherein the at least one catalyst is selected from the group consisting of:
- one or more compounds of the formula R14QZ, wherein R1 is independently chosen from hydrogen or an organyl group, Q is nitrogen, arsenic, antimony or bismuth, and Z is halogen,
- one or more phosphines of the formula R13P, wherein R1 is as defined above,
- one or more alkali metal halides, and
- one or more an alkaline earth metal halides.
A process for the preparation of trichlorosilane (HSiCl3) comprising reacting tetrachlorosilane (SiCl4) with at least one hydridosilane in the presence of at least one catalyst, wherein the at least one hydridosilane is selected from the group consisting of formulae:
- RnSiXmH4-n-m (1),
- and
- RoSi2XpH6-o-p (2),
- wherein
- R is an organic group,
- X is halogen or alkoxy,
- n is 0 to 3,
- m is 0 to 2, and
- n+m=0 to 3,
- o is 0 to 5,
- p is 0 to 5, and
- o+p=1 to 5
- further comprising hydrogenating the resulting chlorosilanes to hydridosilanes of the formulae (1) or (2), and recycling said hydridosilanes into the reaction with tetrachlorosilane.
Dependencies are inferred from the claim text.