Method for manufacturing two-dimensional material using top-down method
AssigneeAjou University Industry-Academic Cooperation Foundation
InventorsJaehyun Lee, Jiyun Moon
Life of this patent
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Abstract
The present embodiments relate to a method for manufacturing a two-dimensional material using a top-down method, the method includes the steps of preparing a bulk crystal, forming a metal layer on the bulk crystal, and then attaching a thermal release tape on the metal layer, exfoliating a two-dimensional material to which the metal layer and the thermal release tape have been attached from the bulk crystal, transferring the two-dimensional material to which the metal layer and the thermal release tape have been attached onto a substrate, and removing the thermal release tape and the metal layer from the substrate onto which the two-dimensional material has been transferred.
Claims6
A method for manufacturing a two-dimensional material using a top-down method, the method comprising the steps of:
- preparing a bulk crystal including multiple layers, each of the multiple layers being formed of the two-dimensional material;
- forming a metal layer on the bulk crystal, and then attaching a thermal release tape on the metal layer;
- exfoliating only one layer of the two-dimensional material to which the metal layer and the thermal release tape have been attached from among the multiple layers in the bulk crystal;
- transferring the one layer of the two-dimensional material to which the metal layer and the thermal release tape have been attached onto a substrate;
- and
- removing the thermal release tape and the metal layer from the substrate onto which the two-dimensional material has been transferred,
- wherein in the step of exfoliating only the one layer of the two-dimensional material from among the multiple layers in the bulk crystal, a difference between a binding energy between the respective multiple layers in the bulk crystal and a binding energy between the bulk crystal and the metal layer is 30 meV/atom or less, and
- wherein the exfoliated one layer of two-dimensional material has an average thickness range of 0.3 nm to 1 nm.
Dependencies are inferred from the claim text.