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US 11,691,871 B2Granted
Microelectromechanical system (MEMS) vibration sensor having a segmented backplate
AssigneeInfineon Technologies AG
InventorsSomu Goswami, Christian Bretthauer, Matthias Friedrich Herrmann, Gunar Lorenz
Life of this patent
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Abstract
A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.
Claims17
A MEMS vibration sensor comprising:
- a membrane comprising an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor;
- and
- a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder,
- wherein the segmented backplate comprises a top segmented backplate arranged over the membrane, a bottom segmented backplate arranged under the membrane and affixed to the holder, a first hole centrally located in the top segmented backplate, and a second hole centrally located in the bottom segmented backplate.
1 more element
A method comprising:
- affixing a membrane to a holder of a MEMS device;
- affixing an inertial mass to the membrane;
- affixing a segmented backplate to the holder;
- and
- generating a plurality of backplate segment signals in response to an acceleration of the MEMS device,
- wherein the segmented backplate comprises a top segmented backplate arranged over the membrane, a bottom segmented backplate arranged under the membrane and affixed to the holder, a first hole centrally located in the top segmented backplate, and a second hole centrally located in the bottom segmented backplate.
3 more elements
A method comprising:
- providing a MEMS device having a membrane and a backplate;
- attaching an inertial mass to the membrane;
- segmenting the backplate into first and second backplate segments;
- generating a first signal from the first backplate segment;
- and
- generating a second signal from the second backplate segment,
- wherein the backplate comprises a top segmented backplate arranged over the membrane, a bottom segmented backplate arranged under the membrane and affixed to a holder, a first hole centrally located in the top segmented backplate, and a second hole centrally located in the bottom segmented backplate.
4 more elements
Dependencies are inferred from the claim text.