Liquid ejection head, and liquid ejection device
AssigneeCanon Kabushiki Kaisha
InventorsTakayuki Kamimura, Michiko Johnson
Life of this patent
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Abstract
A liquid ejection head that includes ejection orifices and is configured by bonding a silicon substrate and a support substrate, flow passages which penetrate a bonding surface between the silicon substrate and the support substrate and through which different types of liquids flow. An in-partition wall space that is open to the bonding surface between the silicon substrate and the support substrate is formed in a partition wall for separating the flow passages. The internal pressure of the in-partition wall space is set to be lower than pressure of the liquid on each of the flow passages.
Claims15
A liquid ejection head configured by bonding a plurality of substrates, the head comprising:
- an ejection orifice from which a liquid is ejected;
- a first flow passage which penetrates a bonding surface between the plurality of substrates and through which a liquid flows;
- a second flow passage which penetrates the bonding surface and through which a liquid different from the liquid flowing through the first flow passage flows;
- and
- an in-partition wall space which is provided in a partition wall for separating the first flow passage and the second flow passage and is open to the bonding surface, wherein
- an internal pressure of the in-partition wall space is lower than any of pressures of the liquids in the first flow passage and the second flow passage.
A liquid ejection head configured by bonding a plurality of substrates, the head comprising:
- an ejection orifice from which a liquid is ejected;
- a first flow passage which penetrates a bonding surface between the plurality of substrates and through which a liquid flows;
- a second flow passage which penetrates the bonding surface and through which a liquid different from the liquid flowing through the first flow passage flows;
- an in-partition wall space which is provided in a partition wall for separating the first flow passage and the second flow passage and is open to the bonding surface;
- and
- a liquid storage portion that stores the liquid flowing into the in-partition wall space and communicates with the in-partition wall space,
- wherein the in-partition wall space is formed to be inclined downward in a gravity direction when the liquid ejection head is used, toward the liquid storage portion in the substrate located on a lower side of the bonding surface in the gravity direction when the liquid ejection head is used.
A liquid ejection device comprising:
- the liquid ejection head comprising
- an ejection orifice from which a liquid is ejected;
- a first flow passage which penetrates a bonding surface between the plurality of substrates and through which a liquid flows;
- a second flow passage which penetrates the bonding surface and through which a liquid different from the liquid flowing through the first flow passage flows;
- and
- an in-partition wall space which is provided in a partition wall for separating the first flow passage and the second flow passage and is open to the bonding surface, wherein
- an internal pressure of the in-partition wall space is lower than any of pressures of the liquids in the first flow passage and the second flow passage,
- the liquid ejection device further comprises a holding unit that holds the liquid ejection head.
Dependencies are inferred from the claim text.