Laminated anodic aluminum oxide structure, guide plate of probe card using same, and probe card having same
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
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Abstract
Proposed are a laminated anodic aluminum oxide structure in which a plurality of anodic aluminum oxide films are stacked, a guide plate of a probe card using the same, and a probe card having the same. More particularly, proposed are a laminated anodic aluminum oxide structure with a high degree of surface strength, a guide plate of a probe card using the same, and a probe card having the same.
Claims7
A laminated anodic aluminum oxide structure, comprising:
- a plurality of anodic aluminum oxide sheets;
- and
- a junction layer provided between the anodic aluminum oxide sheets to join the anodic aluminum oxide sheets to each other,
- wherein an uppermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a first barrier layer, and a lowermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a second barrier layer, and
- wherein an upper surface of the laminated anodic aluminum oxide structure is configured as the first barrier layer, and a lower surface of the laminated anodic aluminum oxide structure is configured as the second barrier layer.
A guide plate of a probe card, the guide plate using a laminated anodic aluminum oxide structure having a guide hole for allowing insertion of a probe of a probe card,
- wherein the laminated anodic aluminum oxide structure comprises:
- a plurality of anodic aluminum oxide sheets;
- and
- a junction layer provided between the anodic aluminum oxide sheets to join the anodic aluminum oxide sheets to each other, and
- wherein an uppermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a first barrier layer, and a lowermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a second barrier layer, and
- wherein an upper surface of the laminated anodic aluminum oxide structure is configured as the first barrier layer, and a lower surface of the laminated anodic aluminum oxide structure is configured as the second barrier layer.
A probe card, comprising:
- a space transformer having a probe connection pad electrically connected to each of a plurality of probes;
- and
- a probe head provided below the space transformer, and including a laminated anodic aluminum oxide structure in which a guide hole for allowing each of the probes is formed,
- wherein the laminated anodic aluminum oxide structure comprises:
- a plurality of anodic aluminum oxide sheets;
- and
- a junction layer provided between the anodic aluminum oxide sheets to join the anodic aluminum oxide sheets to each other, and
- wherein an uppermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a first barrier layer, and a lowermost anodic aluminum oxide sheet of the anodic aluminum oxide sheets comprises a second barrier layer, and
- wherein an upper surface of the laminated anodic aluminum oxide structure is configured as the first barrier layer, and a lower surface of the laminated anodic aluminum oxide structure is configured as the second barrier layer.
Dependencies are inferred from the claim text.