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US 11,691,313 B2Granted
Processing apparatus including a water collection pan
AssigneeDisco Corporation
InventorsToshiyasu Rikiishi, Yasushi Katagiri
Life of this patent
Estimating the term…
Abstract
A processing apparatus includes a chuck table for holding a workpiece, a processing unit for processing the workpiece held on the chuck table as supplying a processing water to the workpiece, and a water pan fixed to a bottom of the processing apparatus for receiving the processing water as a water leaked.
Claims9
A processing apparatus comprising:
- a chuck table for holding a workpiece;
- processing means for processing said workpiece held on said chuck table and supplying a processing water to said workpiece;
- a housing that at least partially encloses said processing means, said housing having a bottom;
- and
- a water pan fixed to the bottom of said housing and configured for receiving said processing water as a water leaked, said water pan including a side wall and a bottom wall that is inclined relative to a horizontal plane, said bottom wall including a plurality of bosses positioned adjacent to an inner surface of the side wall and forming a closed space between said water pan and said bottom of said housing, said bottom wall of said water pan having a low position, which is a position at a vertical distance from said bottom of said housing that is greater than a vertical distance of any other position from said bottom of said housing, and a discharge hole at said low position, wherein said water leaked is collected at said low position and discharged through said discharge hole.
2 more elements
A processing apparatus comprising:
- a chuck table for holding a workpiece;
- processing means for processing said workpiece held on said chuck table and supplying a processing water to said workpiece;
- a housing at least partially enclosing said processing means, said housing having a bottom;
- and
- a water pan fixed to the bottom of said housing and configured for receiving said processing water as a water leaked,
- said water pan including a side wall and a bottom wall that is inclined relative to a horizontal plane, said bottom wall including a plurality of bosses positioned adjacent to an inner surface of the side wall and forming a closed space between said water pan and said bottom of said housing, said bottom wall of said water pan having a low position, which is a position at a vertical distance from said bottom of said housing that is greater than a vertical distance of any other position from said bottom of said housing, and a discharge hole at said low position and a plurality of walls extending from said bottom wall and forming a plurality of corners, wherein said low position and said discharge hole are located at one of said corners, and wherein said water leaked is collected at said low position and discharged through said discharge hole.
3 more elements
Dependencies are inferred from the claim text.