Ultrasound horn
AssigneeKabushiki Kaisha Shinkawa
InventorsHiroshi Munakata, Yuhei Ito, John Ditri, Moe Tehrani
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Abstract
An ultrasound horn is provided which vibrates a bonding tool, attached at a tip, in a plurality of directions with a simple structure. There is provided an ultrasound horn having: a longitudinal vibration generator; a horn portion; and a torsional vibration generator. The torsional vibration generator includes a body including a polygonal pillar portion, second layered elements in which a plurality of second piezoelectric elements are layered, and which are attached to side surfaces of the polygonal pillar portion, weights, and a pressure application ring which applies a pressure by pressing the second piezoelectric elements against the polygonal pillar portion via the weights.
Claims26
An ultrasound horn that is used for a bonding apparatus, the ultrasound horn comprising:
- a longitudinal vibration generator inside of which a first layered element is attached, in which a plurality of first piezoelectric elements of a plate form which deform in a thickness direction when a voltage is applied are layered, and that generates an ultrasound vibration in a front-and-rear direction;
- a horn portion that extends from the longitudinal vibration generator toward a front side and on a front tip of which a bonding tool is attached;
- and
- a torsional vibration generator that extends from the longitudinal vibration generator toward a rear side, wherein
- the torsional vibration generator comprises:
- a body that extends from the longitudinal vibration generator toward the rear side, and that includes a polygonal pillar portion;
- two second layered elements in each of which a plurality of second piezoelectric elements of a plate form which shear-deform when a voltage is applied are layered, and that are respectively attached to respective side surfaces of the polygonal pillar portion in such a manner that a direction of layering is along a width direction orthogonal to the front-and-rear direction;
- weights that are respectively layered at outer sides in the width direction of the second layered elements;
- and
- a pressure application ring that surrounds the weights, the second layered elements, and the polygonal pillar portion, and that presses the plurality of second piezoelectric elements via the weights onto the polygonal pillar portion, to thereby apply a pressure in the thickness direction to the second piezoelectric elements.
A bonding apparatus, comprising:
- an ultrasound horn extending in a front-and-rear direction along a y axis from a rear side to a front tip in a front side, a bonding tool being attached to the front tip;
- and
- a torsional vibration generator located along the ultrasound horn for generating torsional vibration so as to cause a torque in the ultrasound horn about the y axis, wherein the torsional vibration generator further comprises:
- a body having at least a side surface located at a predetermined distance from the y axis in a width direction along a x axis that is perpendicular to the y axis;
- and
- at least one second layered element located adjacent to the side surface and having at least a pair of second piezoelectric elements for shear-deforming to generate reciprocating rotational movement for the torque.
A bonding apparatus, comprising:
- an ultrasound horn extending in a front-and-rear direction along a y axis from a rear side to a front tip in a front side, a bonding tool being attached to the front tip;
- a longitudinal vibration generator located along the ultrasound horn including at least a first layered element having first piezoelectric elements for shear-deforming to generate reciprocating movement in the front-and-rear direction;
- and
- a torsional vibration generator located along the ultrasound horn for generating torsional vibration so as to cause a torque in the ultrasound horn about the y axis, wherein the torsional vibration generator further comprises:
- a body having at least a side surface located at a predetermined distance from the y axis in a width direction along a x axis that is perpendicular to the y axis;
- and
- at least one second layered element located adjacent to the side surface and having at least a pair of second piezoelectric elements for shear-deforming to generate reciprocating rotational movement for the torque.
Dependencies are inferred from the claim text.