System and tool for cleaning a glass surface of an accelerator column
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsMichael J. Blanchard, Nevin H. Clay, Joshua R. Conahan, Christopher Lupoli
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Abstract
A cleaning tool for cleaning a glass surface of an accelerator column is disclosed. The cleaning tool includes a shaft including a first end and a second end; a foam body located at the first end of the shaft; and a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body. An outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column.
Claims11
A method of maintaining an accelerator column, wherein the accelerator column comprises a plurality of electrodes and a plurality of electrode inserts, and wherein each of the electrode inserts is coupled to one of the electrodes of the plurality of electrodes, the method comprising:
- removing one or more electrode inserts from the accelerator column
- inserting a cleaning tool into the accelerator column;
- inserting a foam body located at an end of a shaft of the cleaning tool into a space between adjacent electrodes of the plurality of electrodes, the space being created at least partially by a void created as a result of removing one of the electrode inserts, wherein an outer circumference of the foam body includes a textured cleaning surface for contacting a glass surface of the accelerator column, and wherein the textured cleaning surface includes a plurality of curved serrations extending along a curvature of the textured cleaning surface for contacting a plurality of grooves formed in the glass surface;
- and
- rotating the cleaning tool to clean the space.
Dependencies are inferred from the claim text.