Liquid processing apparatus and liquid processing method

A liquid processing apparatus comprising:

• a tank configured to store a processing liquid supplied from a processing liquid supply source;
• a circulation passage connected to the tank;
• a pump installed at the circulation passage;
• a plurality of liquid processors configured to perform liquid processing on a substrate;
• a plurality of supply passages configured to supply the processing liquid to the plurality of liquid processors respectively;
• a temperature controller installed at the circulation passage and configured to control a temperature of the processing liquid flowing through the circulation passage;
• a first temperature sensor installed at the circulation passage at a position downstream of the temperature controller;
• and
• a second temperature sensor installed at the circulation passage between a downstream of the tank and an upstream of the temperature controller,
• wherein the circulation passage includes a main passage portion provided with the pump, and a first branch passage portion and a second branch passage portion branching from the main passage portion, and the processing liquid flowing out from the tank passes through the main passage portion, then flows into the first branch passage portion and the second branch passage portion, and then returns to the tank through the first branch passage portion and the second branch passage portion,
• wherein the liquid processors are divided into a first processor group to which a portion of the liquid processors belong and a second processor group to which another portion of the liquid processors belong,
• wherein the plurality of supply passages are divided into a first passage group to which a portion of the plurality of supply passages belong and a second passage group to which another portion of the plurality of supply passages belong,
• wherein the liquid processors belonging to the first processor group are connected to the first branch passage portion via the supply passages belonging to the first passage group respectively, and
• wherein the liquid processors belonging to the second processor group are connected to the second branch passage portion via the supply passages belonging to the second passage group respectively.