Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content

A system for supplying a rinsing liquid comprising ultrapure water and an ammonia gas, the system comprising:

• an ultrapure water source in fluid communication with a contactor, wherein the ultrapure water source is configured to supply ultrapure water to the contactor;
• a gas mixture source in fluid communication with the contactor, wherein the gas mixture source is configured to supply the ammonia gas and a carrier gas to the contactor;
• a control unit in fluid communication with the contactor, wherein the control unit is configured to adjust a flow rate of the ultrapure water such that an operational pressure of the contactor remains below a pressure threshold;
• a compressor in fluid communication with the contactor, wherein the compressor is configured to remove a residual transfer gas out of the contactor;
• the contactor configured to generate a rinsing liquid, wherein the rinsing liquid comprises the ultrapure water and a concentration of the ammonia gas dissolved therein;
• and
• a pump in fluid communication between the contactor and an outlet, wherein the pump is configured to deliver the rinsing liquid comprising a gaseous partial pressure below the pressure threshold at the outlet.