Laser ablation apparatus and method of manufacturing display device
AssigneeSamsung Display Co., Ltd.
InventorsJoon Hyung Kim, Young Su Chae, Woo Hyun Kim, Seung Jun Lee
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Abstract
A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.
Claims19
A laser ablation apparatus comprising:
- a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser;
- an output beam generator configured to generate an output beam using the laser beams;
- and
- a substrate stage including at least one stage in which a carrier substrate on which a panel substrate is formed is disposed,
- wherein the output beam generator includes:
- mixers configured to generate mixed laser beams having a plurality of linear-polarizations which intersect at a predetermined angle by mixing the laser beams;
- and
- a photo molding machine configured to generate the output beam using the mixed laser beams,
- wherein the laser beams include first laser beams and second laser beams, and
- wherein the mixers rotate a polarization direction of the first laser beams by the predetermined angle and mix the first laser beams having a rotated polarization direction and the second laser beams to generate the mixed laser beams.
A method of manufacturing a display device, the method comprising:
- forming a panel substrate on the front of a carrier substrate;
- forming a display element layer, a thin film encapsulation layer, and an upper protective layer on the front of the panel substrate;
- disposing the carrier substrate on a stage in a state in which the carrier substrate is overturned;
- irradiating, by an output beam generator, an output beam onto the back of the carrier substrate;
- and
- ablating the panel substrate from the carrier substrate,
- wherein the irradiating the output beam includes:
- generating, by a laser beam generator, laser beams, using a solid-state laser;
- and
- generating, by the output beam generator, the output beam using the laser beams.
Dependencies are inferred from the claim text.