Fin-based well straps for improving memory macro performance
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Chuan Yang, Kuo-Hsiu Hsu, Feng-Ming Chang, Wen-Chun Keng, Lien Jung Hung
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Abstract
An integrated circuit device includes a FinFET disposed over a doped region of a first type dopant, wherein the FinFET includes a first fin structure and first source/drain (S/D) features, the first fin structure having a first width; and a fin-based well strap disposed over the doped region of the first type dopant, wherein the fin-based well strap includes a second fin structure and second S/D features, the second fin structure having a second width that is larger than the first width, wherein the fin-based well strap connects the doped region to a voltage.
Claims20
An integrated circuit device comprising:
- a first FinFET disposed over a doped region of a first type dopant, wherein the first FinFET includes a first fin structure and first source/drain (S/D) features, the first fin structure having a first width;
- a second FinFET disposed over the doped region, wherein the second FinFET includes a second fin structure and second source/drain (S/D) features, the second fin structure having a second width;
- a fin-based well strap disposed over the doped region, wherein the fin-based well strap includes a third fin structure and third S/D features, the third fin structure having a third width that is larger than either of the first width or the second width, wherein the fin-based well strap is configured to bias the doped region to a bias voltage;
- a first fin stub connecting a bottom portion of the first fin structure with a bottom portion of the third fin structure;
- and
- a second fin stub connecting a bottom portion of the second fin structure with the bottom portion of the third fin structure.
An integrated circuit device comprising:
- an n-type well disposed in a substrate, the n-type well being continuous and doped with an n-type dopant;
- a first transistor disposed over the n-type well, wherein the first transistor has a first fin structure and a first gate structure disposed over the first fin structure, such that the first gate structure interposes first source/drain (S/D) features of the first transistor;
- a first well strap disposed over the n-type well, wherein the first well strap has a second fin structure electrically connected to the n-type well and a second gate structure disposed over the second fin structure, such that the second gate structure interposes second S/D features of the first well strap;
- a p-type well disposed in the substrate and abut the n-type well, the p-type well being continuous and doped with a p-type dopant;
- a second transistor disposed over the p-type well, wherein the second transistor has a third fin structure and a third gate structure disposed over the third fin structure, such that the third gate structure interposes third S/D features of the second transistor;
- and
- a second well strap disposed over the p-type well, wherein the second well strap has a fourth fin structure electrically connected to the p-type well and a fourth gate structure disposed over the fourth fin structure, such that the fourth gate structure interposes fourth S/D features of the second well strap,
- wherein a bottom surface of the second S/D features is below a bottom surface of the first S/D features, wherein each of the second and fourth fin structures is wider than the first fin structure, and wherein a center line of the first fin structure is offset and parallel to a center line of the second fin structure.
A memory circuit comprising:
- a first FinFET disposed over a doped region of a first type dopant, wherein the first FinFET includes a first fin structure and first source/drain (S/D) features disposed on the first fin structure, the first S/D features having a first volume;
- a fin-based well strap disposed over the doped region of the first type dopant, wherein the fin-based well strap includes a second fin structure and second S/D features disposed on the second fin structure, the second S/D features having a second volume that is larger than the first volume, wherein the fin-based well strap connects the doped region to a voltage node of the memory circuit, wherein a bottom surface of the second S/D features is below a bottom surface of the first S/D features;
- and
- a second FinFET disposed over the doped region of the first type dopant, wherein the second FinFET includes a third fin structure and third S/D features disposed on the third fin structure, the doped region of the first type dopant is continuous, and a center line of the second fin structure is located between a center line of the first fin structure and a center line of the third fin structure.
Dependencies are inferred from the claim text.