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US 11,690,208 B2Granted
Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment
AssigneeHitachi High-Tech Corporation
InventorsIchiro Miyano, Osamu Komuro, Masakazu Takahashi, Masashi Fujita
Life of this patent
Estimating the term…
Abstract
Provided is an electromagnetic field shielding plate, etc., in which it is possible to reduce weight while achieving high shielding performance from relatively high-frequency electromagnetic fields. The electromagnetic field shielding plate is configured by layering a permalloy layer 3 comprising a plate or sheet of permalloy, and an amorphous layer 1 comprising an Fe—Si—B—Cu—Nb-based amorphous plate or sheet.
Claims27
An electromagnetic field shielding structure having
- a first shielding plate including an electromagnetic field shielding plate configured by stacking a permalloy layer comprising a plate material or a sheet of permalloy and an amorphous layer comprising a plate material or a sheet of Fe—Si—B—Cu—Nb-based amorphous,
- a second shielding plate including another electromagnetic field shielding plate, and
- a ridge connection member, wherein:
- the ridge connection member is configured by stacking at least a ridge permalloy layer comprising a plate material or a sheet of permalloy and a ridge stainless steel layer comprising an austenitic stainless steel material with a thickness in the range of 1.8 mm to 2.4 mm;
- the ridge connection member has a ridge forming a first angle and is provided with female thread elements on both sides of the ridge;
- at least a part on one side of the ridge of the ridge connection member and at least a part of the first shielding plate are fixed so as to overlap;
- and
- at least a part on the other side of the ridge of the ridge connection member and at least a part of the second shielding plate are fixed so as to overlap.
5 more elements
An electromagnetic field shielding structure having
- a first shielding plate including an electromagnetic field shielding plate configured by stacking a permalloy layer comprising a plate material or a sheet of permalloy and an amorphous layer comprising a plate material or a sheet of Fe—Si—B—Cu—Nb-based amorphous,
- a second shielding plate including another electromagnetic field shielding plate,
- a second fixing member provided with a male thread element,
- a frame member provided with a female thread element, and
- a washer, wherein:
- each of the permalloy layer and the amorphous layer is provided with a second through hole;
- the inner diameter of the second through hole is larger than the outer diameter of the head of the second fixing member;
- the outer diameter of the washer is larger than the inner diameter of the second through hole;
- the inner diameter of the washer is smaller than the outer diameter of the head of the second fixing member;
- the washer is arranged on the opposite side of the amorphous layer from the permalloy layer at the second through hole;
- and
- the male thread element of the second fixing member is screwed with the female thread element of the frame member and can tighten and fix the washer toward the amorphous layer and the permalloy layer.
9 more elements
An electromagnetic field shielding structure having an electromagnetic field shielding plate configured by stacking a permalloy layer comprising a plate material or a sheet of permalloy and an amorphous layer comprising a plate material or a sheet of Fe—Si—B—Cu—Nb-based amorphous, wherein:
- the electromagnetic field shielding structure is provided with an opening for wafer transfer;
- and
- a metal reticulated tube member having air permeability is attached to the opening for wafer transfer so as to cover the opening and adhere to the electromagnetic field shielding plate.
An electromagnetic field shielding structure having
- a first shielding plate,
- a second shielding plate, and
- a ridge connection member, wherein:
- each of the first shielding plate and the second shielding plate includes an electromagnetic field shielding plate and the electromagnetic field shielding plate is configured by stacking a soft magnetic material layer and an amorphous layer comprising a plate material or a sheet of Fe—Si—B—Cu—Nb-based amorphous;
- the ridge connection member is an electromagnetic field shielding member comprising a magnetic material;
- the ridge connection member has a ridge;
- at least a part on one side of the ridge of the ridge connection member and at least a part of the first shielding plate are fixed so as to overlap;
- and
- at least a part on the other side of the ridge of the ridge connection member and at least a part of the second shielding plate are fixed so as to overlap.
6 more elements
An electromagnetic field shielding structure having
- a first shielding plate
- a second shielding plate, and
- a ridge connection member, wherein:
- each of the first shielding plate and the second shielding plate includes an electromagnetic field shielding plate and the electromagnetic field shielding plate is configured by stacking a soft magnetic material layer and an amorphous layer comprising a plate material or a sheet of Fe—Si—B—Cu—Nb-based amorphous;
- the ridge connection member is an electromagnetic field shielding member comprising a magnetic material;
- the ridge connection member has a ridge;
- at least a part on one side of the ridge of the ridge connection member and at least a part of the first shielding plate are fixed so as to overlap;
- at least a part on the other side of the ridge of the ridge connection member and at least a part of the second shielding plate are fixed so as to overlap;
- the electromagnetic field shielding structure has a coating layer with which an edge or an opening of the amorphous layer is covered so as not to be exposed;
- and
- the ridge connection member and the first shielding plate and the second shielding plate are fixed detachably and attachably.
8 more elements
Dependencies are inferred from the claim text.