Apparatus and method for extending target material delivery system lifetime
AssigneeASML Netherlands B.V.
InventorsBob Rollinger, Georgiy Olegovich Vaschenko, Chirag Rajyaguru, Alexander Igorevich Ershov, Joshua Mark Lukens, Mathew Cheeran Abraham
Life of this patent
Estimating the term…
Abstract
Disclosed is a system for generating EUV radiation in which current flowing through target material in the orifice 320 of a nozzle in a droplet generator is controlled by providing alternate lower impedance paths for the current and/or by limiting a high frequency component of a drive signal applied to the droplet generator.
Claims20
Apparatus for generating EUV radiation comprising:
- a target material dispenser, the target material dispenser comprising a structure defining a cavity arranged to receive target material and an orifice arranged to receive target material from the cavity and to deliver a stream of droplets of target material;
- an electro-actuatable element mechanically coupled to the cavity and arranged to induce velocity perturbations in the stream of droplets based on a drive signal;
- and
- a drive signal generator electrically coupled to the electro-actuatable element for supplying the drive signal,
- electrical connections with the electro-actuatable element being arranged to control an amount of current flowing through the target material at the orifice.
Apparatus for generating EUV radiation comprising:
- a target material dispenser comprising a structure defining a cavity arranged to receive target material and an orifice arranged to receive target material from the cavity and to deliver a stream of droplets of target material;
- an electro-actuatable element mechanically coupled to the cavity and arranged to induce velocity perturbations in the stream of droplets based on a drive signal;
- and
- a drive signal generator electrically coupled to the electro-actuatable element for supplying the drive signal, wherein a maximum voltage of the drive signal is limited to limit a flow of current through target material in the orifice.
Apparatus for generating EUV radiation comprising:
- a target material dispenser comprising a structure defining a cavity arranged to receive target material and an orifice arranged to receive target material from the cavity and to deliver a stream of droplets of target material;
- an electro-actuatable element mechanically coupled to the cavity and arranged to induce velocity perturbations in the stream of droplets based on a drive signal;
- and
- a drive signal generator electrically coupled to the electro-actuatable element for supplying the drive signal, wherein the drive signal includes a substantially constant DC bias.
A method of dispensing target material in an apparatus for generating EUV radiation, the method comprising the steps of:
- providing a target material dispenser, the target material dispenser comprising a structure defining a cavity arranged to receive target material and an orifice arranged to receive target material from the cavity and to deliver a stream of droplets of target material;
- providing an electro-actuatable element mechanically coupled to the cavity and arranged to induce velocity perturbations in the stream of droplets based on a drive signal;
- and
- supplying a drive signal to the electro-actuatable element, wherein the drive signal includes a substantially constant DC bias.
A method of dispensing target material in an apparatus for generating EUV radiation, the method comprising the steps of:
- providing a target material dispenser, the target material dispenser comprising a structure defining a cavity arranged to receive target material and an orifice arranged to receive target material from the cavity and to deliver a stream of droplets of target material;
- providing an electro-actuatable element mechanically coupled to the cavity and arranged to induce velocity perturbations in the stream of droplets based on a drive signal;
- and
- supplying a drive signal to the electro-actuatable element, wherein a maximum voltage of the drive signal is limited to limit a flow of current through target material in the orifice.
Dependencies are inferred from the claim text.