MEMS microphone and method of manufacturing the same
AssigneeDB HiTek Co., Ltd.
InventorJong Won Sun
Life of this patent
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Abstract
A MEMS microphone includes a substrate having a cavity, a diaphragm disposed over the substrate to cover the cavity, an anchor extending from and end portion of the diaphragm to surround a periphery of the diaphragm, the anchor being fixed to a lower surface of the substrate to support the diaphragm from the substrate, a back plate disposed over the diaphragm, the back plate being spaced apart from the diaphragm to define an air gap therebetween and having a plurality of acoustic holes, an upper insulation layer covering an upper surface of the back plate to hold the back plate, and a strut positioned on the anchor, the strut being connected to the upper insulation layer and making contact with a lower surface of the anchor to support the upper insulation layer and to be spaced from the diaphragm.
Claims10
A MEMS microphone comprising:
- a substrate having a cavity;
- a diaphragm disposed over the substrate and covering the cavity, the diaphragm spaced apart from the substrate and being configured to sense an acoustic pressure to generate a displacement;
- an anchor extending from an end portion of the diaphragm to surround a periphery of the diaphragm, the anchor being fixed to a lower surface of the substrate to support the diaphragm from the substrate;
- a back plate disposed over the diaphragm, the back plate being spaced apart from the diaphragm to define an air gap therebetween and defining a plurality of acoustic holes;
- an upper insulation layer covering an upper surface of the back plate to hold the back plate;
- and
- a strut positioned directly on the anchor, the strut being connected to the upper insulation layer and making contact with a lower surface of the anchor to support the upper insulation layer and to be spaced from the diaphragm.
A MEMS microphone comprising:
- a substrate being divided into a vibration area, a supporting area surrounding the vibration area and a peripheral area surrounding the supporting area, the substrate having a cavity formed in the vibration area;
- a diaphragm disposed over the substrate to cover the cavity, the diaphragm being spaced apart from the substrate and being configured to sense an acoustic pressure to generate a displacement;
- an anchor extending from an end portion of the diaphragm, positioned in the supporting area and surrounding a periphery of the diaphragm, the anchor being fixed to a lower surface of the substrate to support the diaphragm from the substrate;
- a back plate disposed over the diaphragm and in the vibration area, the back plate being spaced apart from the diaphragm to define an air gap therebetween and having a plurality of acoustic holes;
- an upper insulation layer covering the back plate to hold the back plate;
- and
- a strut positioned on the anchor and in the supporting area, the strut being connected to the upper insulation layer and making contact with a lower surface of the anchor to support the upper insulation layer and to be spaced from the diaphragm.
Dependencies are inferred from the claim text.