Resonator device

A resonator device, comprising:

• a resonator element;
• a first package that accommodates the resonator element;
• and
• a second package in which the first package is accommodated and fixed, wherein
• the first package includes
• a base substrate that has a first surface on which the resonator element is disposed and a second surface which is in a front-back relationship with the first surface, and that contains single crystal silicon,
• an integrated circuit that is provided on the first surface or the second surface and that includes a temperature sensor circuit and a heater circuit,
• a wirings that is provided on the first surface of the base substrate,
• an internal coupling terminal that is provided on the integrated circuit and electrically coupled to the wiring,
• an external coupling terminal that is provided on the second surface of the base substrate,
• a through electrode configured by filling a conductive material in a through hole penetrating from the first surface to the second surface of the base substrate, and
• a lid that is bonded to the base substrate such that the resonator element is accommodated between the lid and the base substrate, wherein
• the resonator element is disposed on the integrated circuit and bonded to the internal coupling terminal, and
• the wiring and the external coupling terminal are electrically coupled via the through electrode.