Resonator device
AssigneeSeiko Epson Corporation
InventorTomoyuki Kamakura
Life of this patent
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Abstract
A resonator device includes: a base having a first surface and a second surface that are in front-back relation; a resonator element that is located at a first surface with respect to the base and that includes a resonation substrate and an electrode disposed at a surface of the resonation substrate on a base side; a conductive layer that is disposed at the first surface and that includes a joint portion joined to the electrode; and a stress relaxation layer that is interposed between the base and the conductive layer and that at least partially overlaps with the joint portion in a plan view of the base. The stress relaxation layer includes an exposed portion exposed from the conductive layer.
Claims4
A resonator device comprising:
- a base having a first surface and a second surface that are in front-back relation;
- a resonator element that is located at a first surface with respect to the base and that includes a resonation substrate and an electrode disposed at a surface of the resonation substrate on a base side;
- a conductive layer that is disposed at the first surface and that includes a joint portion joined to the electrode;
- and
- a stress relaxation layer that is interposed between the base and the conductive layer and that at least partially overlaps with the joint portion in a plan view of the base,
- wherein the stress relaxation layer includes an exposed portion exposed from the conductive layer;
- the conductive layer includes the joint portion, a wiring portion disposed at the first surface, and a coupling portion that couples the joint portion and the wiring portion;
- the coupling portion includes a first coupling portion extending to a plus side in a first direction and a second coupling portion extending to a minus side in the first direction;
- and
- the coupling portion further includes a third coupling portion extending to a plus side in a second direction intersecting with the first direction, and a fourth coupling portion extending to a minus side in the second direction.
Dependencies are inferred from the claim text.