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US 11,689,182 B2Granted
Acoustic wave element, filter element, and communication apparatus
AssigneeKYOCERA Corporation
InventorsNaofumi Kasamatsu, Masahisa Shimozono, Tetsuya Kishino, Masaki Nanbu, Hongnian Li, Tatsuya Doumoto
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Abstract
An acoustic wave element 1 according to the present disclosure includes a piezoelectric substrate 2 and an IDT electrode 3 on the piezoelectric substrate 2. The IDT electrode 3 includes a multilayer structure of a first layer 35 comprised of Al containing 10% or less of a sub-component and a second layer 37 comprised of a CuAl2 alloy. The second layer 37 enables the acoustic wave element 1 to have excellent electric power resistance.
Claims18
An acoustic wave element comprising:
- a piezoelectric substrate and
- an IDT electrode which is located on the piezoelectric substrate and comprises a multilayer structure having a first layer comprising Al containing 10% or less of a sub-component and a second layer comprising a CuAl2 alloy, wherein, in the IDT electrode, the second layer is located on the piezoelectric substrate,
- wherein the second layer comprises a part having a thinner thickness compared with a periphery, the part being at a position separated from an outer edge and extending to an inner portion.
An acoustic wave element comprising:
- a piezoelectric substrate and
- an IDT electrode which is located on the piezoelectric substrate and comprises a multilayer structure having a first layer comprising Al containing 10% or less of a sub-component and a second layer comprising a CuAl2 alloy, wherein, in the IDT electrode, the second layer is located on the piezoelectric substrate,
- wherein the first layer contains Cu as the sub-component and comprises a gradient of concentration of Cu in the thickness direction.
Dependencies are inferred from the claim text.