Anode active material for lithium secondary battery, method of forming the same and lithium secondary battery including the same

A method of forming an anode active material for a lithium secondary battery, comprising:

• preparing a carbon-based particle including pores that have a pore size of 20 nm or less;
• injecting a silicon-based compound gas to the carbon-based particle;
• and
• firing the carbon-based particle together with the silicon-based compound gas to deposit a silicon-based compound, the silicon-based compound including silicon and at least one of silicon oxide (SiOx, 0<x<2) and silicon carbide (SiC) at an inside of the pores of the carbon-based particle or on the surface of the carbon-based particle,
• wherein a peak intensity ratio in a Raman spectrum of silicon defined by Equation 2 is 1.2 or less:
• Peak intensity ratio of Raman spectrum=I(515)/I(480) [Equation 2]
• wherein, in Equation 2, I(515) is a peak intensity of silicon in a region having a wavenumber of 515 cm−1 in the Raman spectrum, and I(480) is a peak intensity of silicon in a region having a wavenumber of 480 cm−1 in the Raman spectrum.